Inventor
TAKASE TAMAO
JP3 patents
Patents
3 patentsUS6541861B2Apr 1, 2003
Semiconductor device manufacturing method including forming step of SOI structure and semiconductor device having SOI structure
TOSHIBA KK70 citations95
US6051508AApr 18, 2000
Manufacturing method of semiconductor device
TOSHIBA KK81 citations94
US6555925B1Apr 29, 2003
Semiconductor device and producing method thereof
TOSHIBA KK33 citations92