Inventor
LUTTMER JOSEPH D
US21 patents
Patents
21 patentsUS4837113AJun 6, 1989
Method for depositing compound from group II-VI
TEXAS INSTRUMENTS INC475 citations99
US4949671AAug 21, 1990
Processing apparatus and method
TEXAS INSTRUMENTS INC372 citations98
US5248636ASep 28, 1993
Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation
TEXAS INSTRUMENTS INC86 citations96
US5138973AAug 18, 1992
Wafer processing apparatus having independently controllable energy sources
TEXAS INSTRUMENTS INC108 citations96
US4988533AJan 29, 1991
Method for deposition of silicon oxide on a wafer
TEXAS INSTRUMENTS INC116 citations96
US4877757AOct 31, 1989
Method of sequential cleaning and passivating a GaAs substrate using remote oxygen plasma
TEXAS INSTRUMENTS INC83 citations96
US5157000AOct 20, 1992
Method for dry etching openings in integrated circuit layers
TEXAS INSTRUMENTS INC72 citations95
US6284675B1Sep 4, 2001
Method of forming integrated circuit dielectric by evaporating solvent to yield phase separation
TEXAS INSTRUMENTS INC42 citations92
US4614835ASep 30, 1986
Photovoltaic solar arrays using silicon microparticles
TEXAS INSTRUMENTS INC47 citations90
US5188970AFeb 23, 1993
Method for forming an infrared detector having a refractory metal
TEXAS INSTRUMENTS INC26 citations88
US4855160AAug 8, 1989
Method for passivating wafer
TEXAS INSTRUMENTS INC8 citations74
US4838984AJun 13, 1989
Method for etching films of mercury-cadmium-telluride and zinc sulfid
TEXAS INSTRUMENTS INC11 citations74
US7187080B2Mar 6, 2007
Semiconductor device with a conductive layer including a copper layer with a dopant
TEXAS INSTRUMENTS INC6 citations73
US6911394B2Jun 28, 2005
Semiconductor devices and methods of manufacturing such semiconductor devices
TEXAS INSTRUMENTS INC11 citations73
US6784121B1Aug 31, 2004
Integrated circuit dielectric and method
TEXAS INSTRUMENTS INC8 citations73
US5077092ADec 31, 1991
Method and apparatus for deposition of zinc sulfide films
TEXAS INSTRUMENTS INC9 citations73
US5017511AMay 21, 1991
Method for dry etching vias in integrated circuit layers
TEXAS INSTRUMENTS INC12 citations72
US5523241AJun 4, 1996
Method of making infrared detector with channel stops
TEXAS INSTRUMENTS INC10 citations69
US6063692AMay 16, 2000
Oxidation barrier composed of a silicide alloy for a thin film and method of construction
TEXAS INSTRUMENTS INC6 citations62
US4876222AOct 24, 1989
Semiconductor passivation
TEXAS INSTRUMENTS INC5 citations60
US5132761AJul 21, 1992
Method and apparatus for forming an infrared detector having a refractory metal
TEXAS INSTRUMENTS INC1 citations48