Inventor
FETTERS WAYNE
US6 patents
Patents
6 patentsUS6156167ADec 5, 2000
Clamshell apparatus for electrochemically treating semiconductor wafers
NOVELLUS SYSTEMS INC325 citations98
US6139712AOct 31, 2000
Method of depositing metal layer
NOVELLUS SYSTEMS INC198 citations98
US6589401B1Jul 8, 2003
Apparatus for electroplating copper onto semiconductor wafer
NOVELLUS SYSTEMS INC67 citations95
US6436249B1Aug 20, 2002
Clamshell apparatus for electrochemically treating semiconductor wafers
NOVELLUS SYSTEMS INC69 citations95
US6343793B1Feb 5, 2002
Dual channel rotary union
NOVELLUS SYSTEMS INC19 citations92
US6815349B1Nov 9, 2004
Electroless copper deposition apparatus
NOVELLUS SYSTEMS INC34 citations90