Inventor

SCHNEIDER-GMELCH BRIGITTE

DE2 patents

Patents

2 patents

US4338281AJul 6, 1982

Thin film semiconductor gas sensor having an integrated heating element

SIEMENS AG60 citations90

US4587184AMay 6, 1986

Method for manufacturing accurate structures with a high aspect ratio and particularly for manufacturing X-ray absorber masks

SIEMENS AG13 citations63