Inventor
KUBIAK GLENN D
US9 patents
⚠️ This page may combine multiple inventors who share the name “KUBIAK GLENN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EUV LLC
7 patentsUS6285737B1Sep 4, 2001
Condenser for extreme-UV lithography with discharge source
EUV LLC116 citations97
US6031598AFeb 29, 2000
Extreme ultraviolet lithography machine
EUV LLC148 citations97
US6396068B1May 28, 2002
Illumination system having a plurality of movable sources
EUV LLC32 citations92
US7081992B2Jul 25, 2006
Condenser optic with sacrificial reflective surface
EUV LLC11 citations83
US7239443B2Jul 3, 2007
Condenser optic with sacrificial reflective surface
EUV LLC5 citations73
US6563907B1May 13, 2003
Radiation source with shaped emission
EUV LLC12 citations73
US6011267AJan 4, 2000
Erosion resistant nozzles for laser plasma extreme ultraviolet (EUV) sources
EUV LLC13 citations66