Inventor
KALPATHY-CRAMER JAYASHREE
US12 patents
⚠️ This page may combine multiple inventors who share the name “KALPATHY-CRAMER JAYASHREE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
9 patentsUS5882251AMar 16, 1999
Chemical mechanical polishing pad slurry distribution grooves
LSI LOGIC CORP144 citations98
US5893756AApr 13, 1999
Use of ethylene glycol as a corrosion inhibitor during cleaning after metal chemical mechanical polishing
LSI LOGIC CORP127 citations97
US5888121AMar 30, 1999
Controlling groove dimensions for enhanced slurry flow
LSI LOGIC CORP95 citations96
US6784045B1Aug 31, 2004
Microchannel formation for fuses, interconnects, capacitors, and inductors
LSI LOGIC CORP26 citations92
US6254456B1Jul 3, 2001
Modifying contact areas of a polishing pad to promote uniform removal rates
LSI LOGIC CORP26 citations91
US6093280AJul 25, 2000
Chemical-mechanical polishing pad conditioning systems
LSI LOGIC CORP50 citations91
US5913715AJun 22, 1999
Use of hydrofluoric acid for effective pad conditioning
LSI LOGIC CORP30 citations91
US5835226ANov 10, 1998
Method for determining optical constants prior to film processing to be used improve accuracy of post-processing thickness measurements
LSI LOGIC CORP52 citations90
US6464566B1Oct 15, 2002
Apparatus and method for linearly planarizing a surface of a semiconductor wafer
LSI LOGIC CORP2 citations62