P

Inventor

KOJIMA KATSUYOSHI

JP6 patents
⚠️ This page may combine multiple inventors who share the name “KOJIMA KATSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA CERAMICS CO

3 patents
US6517422B2Feb 11, 2003

Polishing apparatus and method thereof

TOSHIBA CERAMICS CO13 citations76
US6976908B2Dec 20, 2005

Polishing head and polishing apparatus

TOSHIBA CERAMICS CO7 citations69
US6668662B2Dec 30, 2003

Viscoelasticity measuring device

TOSHIBA CERAMICS CO5 citations60

DISCO CORP

3 patents
US11612979B2Mar 28, 2023

Polishing pad

DISCO CORP0 citations50
US9994739B2Jun 12, 2018

Polishing liquid and method of polishing SiC substrate

DISCO CORP0 citations50
US9761454B2Sep 12, 2017

Method of polishing SiC substrate

DISCO CORP0 citations39