Inventor
MCSTAY IRENE
US9 patents
⚠️ This page may combine multiple inventors who share the name “MCSTAY IRENE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS6498061B2Dec 24, 2002
Negative ion implant mask formation for self-aligned, sublithographic resolution patterning for single-sided vertical device formation
IBM66 citations96
US6555430B1Apr 29, 2003
Process flow for capacitance enhancement in a DRAM trench
IBM44 citations92
US6613642B2Sep 2, 2003
Method for surface roughness enhancement in semiconductor capacitor manufacturing
IBM8 citations73
US6709947B1Mar 23, 2004
Method of area enhancement in capacitor plates
IBM5 citations57
INFINEON TECHNOLOGIES AG
4 patentsUS6706634B1Mar 16, 2004
Control of separation between transfer gate and storage node in vertical DRAM
INFINEON TECHNOLOGIES AG39 citations92
US6620724B1Sep 16, 2003
Low resistivity deep trench fill for DRAM and EDRAM applications
INFINEON TECHNOLOGIES AG23 citations92
US6458647B1Oct 1, 2002
Process flow for sacrificial collar with poly mask
INFINEON TECHNOLOGIES AG22 citations92
US6905944B2Jun 14, 2005
Sacrificial collar method for improved deep trench processing
INFINEON TECHNOLOGIES AG34 citations91