Inventor
WADA YUTAKA
JP62 patents
⚠️ This page may combine multiple inventors who share the name “WADA YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
36 patentsUS5838447ANov 17, 1998
Polishing apparatus including thickness or flatness detector
EBARA CORP336 citations99
US6220945B1Apr 24, 2001
Polishing apparatus
EBARA CORP51 citations96
US6005183ADec 21, 1999
Device containing solar cell panel and storage battery
EBARA CORP96 citations96
US5882244AMar 16, 1999
Polishing apparatus
EBARA CORP65 citations96
US6942548B2Sep 13, 2005
Polishing method using an abrading plate
EBARA CORP27 citations93
US6752692B2Jun 22, 2004
Cleaning method and polishing apparatus employing such cleaning method
EBARA CORP18 citations93
US6712678B1Mar 30, 2004
Polishing-product discharging device and polishing device
EBARA CORP27 citations93
US6672945B1Jan 6, 2004
Polishing apparatus and dressing method
EBARA CORP25 citations93
US6458012B1Oct 1, 2002
Polishing apparatus
EBARA CORP18 citations93
US6413149B1Jul 2, 2002
Abrading plate and polishing method using the same
EBARA CORP31 citations93
US6402588B1Jun 11, 2002
Polishing apparatus
EBARA CORP42 citations93
US6390901B1May 21, 2002
Polishing apparatus
EBARA CORP51 citations93
US6336850B1Jan 8, 2002
Slurry dispenser and polishing apparatus
EBARA CORP28 citations93
US6325698B1Dec 4, 2001
Cleaning method and polishing apparatus employing such cleaning method
EBARA CORP31 citations93
US6217411B1Apr 17, 2001
Polishing apparatus
EBARA CORP33 citations93
US6196904B1Mar 6, 2001
Polishing apparatus
EBARA CORP19 citations93
US6190243B1Feb 20, 2001
Polishing apparatus
EBARA CORP36 citations93
US7214122B2May 8, 2007
Substrate polishing apparatus
EBARA CORP19 citations92
US6595831B1Jul 22, 2003
Method for polishing workpieces using fixed abrasives
EBARA CORP43 citations92
US6406364B1Jun 18, 2002
Polishing solution feeder
EBARA CORP25 citations92
US6454644B1Sep 24, 2002
Polisher and method for manufacturing same and polishing tool
EBARA CORP36 citations89
US7108579B2Sep 19, 2006
Method and device for polishing
EBARA CORP16 citations84
US6579148B2Jun 17, 2003
Polishing apparatus
EBARA CORP13 citations84
US6626739B1Sep 30, 2003
Polishing method and polishing apparatus
EBARA CORP7 citations74
US6520845B2Feb 18, 2003
Polishing apparatus
EBARA CORP9 citations74
US6398626B1Jun 4, 2002
Polishing apparatus
EBARA CORP8 citations74
US6261162B1Jul 17, 2001
Polishing apparatus and method of manufacturing grinding plate
EBARA CORP11 citations74
US6015337AJan 18, 2000
Polishing apparatus
EBARA CORP12 citations74
US8965555B2Feb 24, 2015
Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus
EBARA CORP5 citations73
US6827633B2Dec 7, 2004
Polishing method
EBARA CORP8 citations73
US6102786AAug 15, 2000
Polishing apparatus including turntable with polishing surface of different heights
EBARA CORP12 citations73
US5888126AMar 30, 1999
Polishing apparatus including turntable with polishing surface of different heights
EBARA CORP15 citations73
US6315643B1Nov 13, 2001
Polishing apparatus and method
EBARA CORP8 citations69
US6413155B2Jul 2, 2002
Polishing apparatus
EBARA CORP2 citations63
US7527723B2May 5, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP2 citations62
US7507144B2Mar 24, 2009
Substrate polishing apparatus
EBARA CORP3 citations62
HITACHI LTD
4 patentsUS4831546AMay 16, 1989
Method and apparatus for assisting layout design
HITACHI LTD106 citations95
US4984180AJan 8, 1991
Method for computer aided generator of design reference and apparatus therefor
HITACHI LTD38 citations92
US4789944ADec 6, 1988
Design support method and apparatus therefor
HITACHI LTD51 citations91
US5559939ASep 24, 1996
Method and apparatus for preparing a document containing information in real mathematical notation
HITACHI LTD49 citations89
SUMITOMO ELECTRIC INDUSTRIES
2 patentsSONY CORP
2 patentsHONDA HIDETOSHI
1 patentNIPPON PAINT CO LTD
1 patentKAWAGUCHI HIROTO
1 patentWADA YUTAKA
1 patentOTSUKA PHARMA CO LTD
1 patentFUKUDA AKIRA
1 patentShowing the top 50 of 62 patents by PatentIndex Score.