P

Inventor

WADA YUTAKA

JP62 patents
⚠️ This page may combine multiple inventors who share the name “WADA YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

36 patents
US5838447ANov 17, 1998

Polishing apparatus including thickness or flatness detector

EBARA CORP336 citations99
US6220945B1Apr 24, 2001

Polishing apparatus

EBARA CORP51 citations96
US6005183ADec 21, 1999

Device containing solar cell panel and storage battery

EBARA CORP96 citations96
US5882244AMar 16, 1999

Polishing apparatus

EBARA CORP65 citations96
US6942548B2Sep 13, 2005

Polishing method using an abrading plate

EBARA CORP27 citations93
US6752692B2Jun 22, 2004

Cleaning method and polishing apparatus employing such cleaning method

EBARA CORP18 citations93
US6712678B1Mar 30, 2004

Polishing-product discharging device and polishing device

EBARA CORP27 citations93
US6672945B1Jan 6, 2004

Polishing apparatus and dressing method

EBARA CORP25 citations93
US6458012B1Oct 1, 2002

Polishing apparatus

EBARA CORP18 citations93
US6413149B1Jul 2, 2002

Abrading plate and polishing method using the same

EBARA CORP31 citations93
US6402588B1Jun 11, 2002

Polishing apparatus

EBARA CORP42 citations93
US6390901B1May 21, 2002

Polishing apparatus

EBARA CORP51 citations93
US6336850B1Jan 8, 2002

Slurry dispenser and polishing apparatus

EBARA CORP28 citations93
US6325698B1Dec 4, 2001

Cleaning method and polishing apparatus employing such cleaning method

EBARA CORP31 citations93
US6217411B1Apr 17, 2001

Polishing apparatus

EBARA CORP33 citations93
US6196904B1Mar 6, 2001

Polishing apparatus

EBARA CORP19 citations93
US6190243B1Feb 20, 2001

Polishing apparatus

EBARA CORP36 citations93
US7214122B2May 8, 2007

Substrate polishing apparatus

EBARA CORP19 citations92
US6595831B1Jul 22, 2003

Method for polishing workpieces using fixed abrasives

EBARA CORP43 citations92
US6406364B1Jun 18, 2002

Polishing solution feeder

EBARA CORP25 citations92
US6454644B1Sep 24, 2002

Polisher and method for manufacturing same and polishing tool

EBARA CORP36 citations89
US7108579B2Sep 19, 2006

Method and device for polishing

EBARA CORP16 citations84
US6579148B2Jun 17, 2003

Polishing apparatus

EBARA CORP13 citations84
US6626739B1Sep 30, 2003

Polishing method and polishing apparatus

EBARA CORP7 citations74
US6520845B2Feb 18, 2003

Polishing apparatus

EBARA CORP9 citations74
US6398626B1Jun 4, 2002

Polishing apparatus

EBARA CORP8 citations74
US6261162B1Jul 17, 2001

Polishing apparatus and method of manufacturing grinding plate

EBARA CORP11 citations74
US6015337AJan 18, 2000

Polishing apparatus

EBARA CORP12 citations74
US8965555B2Feb 24, 2015

Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus

EBARA CORP5 citations73
US6827633B2Dec 7, 2004

Polishing method

EBARA CORP8 citations73
US6102786AAug 15, 2000

Polishing apparatus including turntable with polishing surface of different heights

EBARA CORP12 citations73
US5888126AMar 30, 1999

Polishing apparatus including turntable with polishing surface of different heights

EBARA CORP15 citations73
US6315643B1Nov 13, 2001

Polishing apparatus and method

EBARA CORP8 citations69
US6413155B2Jul 2, 2002

Polishing apparatus

EBARA CORP2 citations63
US7527723B2May 5, 2009

Electrolytic processing apparatus and electrolytic processing method

EBARA CORP2 citations62
US7507144B2Mar 24, 2009

Substrate polishing apparatus

EBARA CORP3 citations62

HITACHI LTD

4 patents

SUMITOMO ELECTRIC INDUSTRIES

2 patents

SONY CORP

2 patents

HONDA HIDETOSHI

1 patent

NIPPON PAINT CO LTD

1 patent

KAWAGUCHI HIROTO

1 patent

WADA YUTAKA

1 patent

OTSUKA PHARMA CO LTD

1 patent

FUKUDA AKIRA

1 patent

Showing the top 50 of 62 patents by PatentIndex Score.