Inventor
HIYAMA HIROKUNI
JP55 patents
⚠️ This page may combine multiple inventors who share the name “HIYAMA HIROKUNI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
43 patentsUS6861642B2Mar 1, 2005
Neutral particle beam processing apparatus
EBARA CORP421 citations99
US6849857B2Feb 1, 2005
Beam processing apparatus
EBARA CORP352 citations99
US5838447ANov 17, 1998
Polishing apparatus including thickness or flatness detector
EBARA CORP336 citations99
US6220945B1Apr 24, 2001
Polishing apparatus
EBARA CORP51 citations96
US5882244AMar 16, 1999
Polishing apparatus
EBARA CORP65 citations96
US7150673B2Dec 19, 2006
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus
EBARA CORP15 citations93
US6942548B2Sep 13, 2005
Polishing method using an abrading plate
EBARA CORP27 citations93
US6752692B2Jun 22, 2004
Cleaning method and polishing apparatus employing such cleaning method
EBARA CORP18 citations93
US6712678B1Mar 30, 2004
Polishing-product discharging device and polishing device
EBARA CORP27 citations93
US6672945B1Jan 6, 2004
Polishing apparatus and dressing method
EBARA CORP25 citations93
US6609950B2Aug 26, 2003
Method for polishing a substrate
EBARA CORP20 citations93
US6458012B1Oct 1, 2002
Polishing apparatus
EBARA CORP18 citations93
US6413149B1Jul 2, 2002
Abrading plate and polishing method using the same
EBARA CORP31 citations93
US6402588B1Jun 11, 2002
Polishing apparatus
EBARA CORP42 citations93
US6390901B1May 21, 2002
Polishing apparatus
EBARA CORP51 citations93
US6336850B1Jan 8, 2002
Slurry dispenser and polishing apparatus
EBARA CORP28 citations93
US6325698B1Dec 4, 2001
Cleaning method and polishing apparatus employing such cleaning method
EBARA CORP31 citations93
US6217411B1Apr 17, 2001
Polishing apparatus
EBARA CORP33 citations93
US6196904B1Mar 6, 2001
Polishing apparatus
EBARA CORP19 citations93
US6190243B1Feb 20, 2001
Polishing apparatus
EBARA CORP36 citations93
US6595831B1Jul 22, 2003
Method for polishing workpieces using fixed abrasives
EBARA CORP43 citations92
US6406364B1Jun 18, 2002
Polishing solution feeder
EBARA CORP25 citations92
US5857898AJan 12, 1999
Method of and apparatus for dressing polishing cloth
EBARA CORP41 citations91
US6454644B1Sep 24, 2002
Polisher and method for manufacturing same and polishing tool
EBARA CORP36 citations89
US7234999B2Jun 26, 2007
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus
EBARA CORP12 citations84
US6861643B2Mar 1, 2005
Neutral particle beam processing apparatus
EBARA CORP14 citations84
US6579148B2Jun 17, 2003
Polishing apparatus
EBARA CORP13 citations84
US4489951ADec 25, 1984
Mechanical seal
EBARA CORP25 citations82
US7314574B2Jan 1, 2008
Etching method and apparatus
EBARA CORP7 citations74
US7291057B2Nov 6, 2007
Apparatus for polishing a substrate
EBARA CORP7 citations74
US6626739B1Sep 30, 2003
Polishing method and polishing apparatus
EBARA CORP7 citations74
US6520845B2Feb 18, 2003
Polishing apparatus
EBARA CORP9 citations74
US6398626B1Jun 4, 2002
Polishing apparatus
EBARA CORP8 citations74
US6261162B1Jul 17, 2001
Polishing apparatus and method of manufacturing grinding plate
EBARA CORP11 citations74
US6015337AJan 18, 2000
Polishing apparatus
EBARA CORP12 citations74
US5266012ANov 30, 1993
Vibrating column pump
EBARA CORP12 citations74
US4910449AMar 20, 1990
System for preventing unbalance vibrations and synchronous disturbance vibrations
EBARA CORP17 citations74
US8965555B2Feb 24, 2015
Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus
EBARA CORP5 citations73
US6102786AAug 15, 2000
Polishing apparatus including turntable with polishing surface of different heights
EBARA CORP12 citations73
US5888126AMar 30, 1999
Polishing apparatus including turntable with polishing surface of different heights
EBARA CORP15 citations73
US6315643B1Nov 13, 2001
Polishing apparatus and method
EBARA CORP8 citations69
US7361076B2Apr 22, 2008
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus
EBARA CORP4 citations63
US6909087B2Jun 21, 2005
Method of processing a surface of a workpiece
EBARA CORP5 citations63
NAT AEROSPACE LAB
2 patentsJAPAN GOVERNMENT
2 patentsUNIV TOHOKU
2 patentsFUKUDA AKIRA
1 patentShowing the top 50 of 55 patents by PatentIndex Score.