Inventor
HIROKAWA KAZUTO
JP40 patents
⚠️ This page may combine multiple inventors who share the name “HIROKAWA KAZUTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
38 patentsUS6899592B1May 31, 2005
Polishing apparatus and dressing method for polishing tool
EBARA CORP72 citations96
US6220945B1Apr 24, 2001
Polishing apparatus
EBARA CORP51 citations96
US5142173AAug 25, 1992
Bearing structure
EBARA CORP73 citations95
US4998033AMar 5, 1991
Gas dynamic bearing for spindle motor
EBARA CORP63 citations94
US7150673B2Dec 19, 2006
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus
EBARA CORP15 citations93
US6942548B2Sep 13, 2005
Polishing method using an abrading plate
EBARA CORP27 citations93
US6712678B1Mar 30, 2004
Polishing-product discharging device and polishing device
EBARA CORP27 citations93
US6672945B1Jan 6, 2004
Polishing apparatus and dressing method
EBARA CORP25 citations93
US6458012B1Oct 1, 2002
Polishing apparatus
EBARA CORP18 citations93
US6413149B1Jul 2, 2002
Abrading plate and polishing method using the same
EBARA CORP31 citations93
US6402588B1Jun 11, 2002
Polishing apparatus
EBARA CORP42 citations93
US6390901B1May 21, 2002
Polishing apparatus
EBARA CORP51 citations93
US6336850B1Jan 8, 2002
Slurry dispenser and polishing apparatus
EBARA CORP28 citations93
US6217411B1Apr 17, 2001
Polishing apparatus
EBARA CORP33 citations93
US6196904B1Mar 6, 2001
Polishing apparatus
EBARA CORP19 citations93
US6190243B1Feb 20, 2001
Polishing apparatus
EBARA CORP36 citations93
US7214122B2May 8, 2007
Substrate polishing apparatus
EBARA CORP19 citations92
US6595831B1Jul 22, 2003
Method for polishing workpieces using fixed abrasives
EBARA CORP43 citations92
US5357162AOct 18, 1994
Spindle motor using dynamic pressure bearings
EBARA CORP38 citations92
US5089732AFeb 18, 1992
Spindle motor
EBARA CORP43 citations92
US8002607B2Aug 23, 2011
Polishing apparatus and polishing method
EBARA CORP11 citations84
US7967660B2Jun 28, 2011
Polishing apparatus and polishing method
EBARA CORP7 citations84
US7234999B2Jun 26, 2007
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus
EBARA CORP12 citations84
US6579148B2Jun 17, 2003
Polishing apparatus
EBARA CORP13 citations84
US6626739B1Sep 30, 2003
Polishing method and polishing apparatus
EBARA CORP7 citations74
US6520845B2Feb 18, 2003
Polishing apparatus
EBARA CORP9 citations74
US6398626B1Jun 4, 2002
Polishing apparatus
EBARA CORP8 citations74
US6261162B1Jul 17, 2001
Polishing apparatus and method of manufacturing grinding plate
EBARA CORP11 citations74
US11472001B2Oct 18, 2022
Elastic membrane and substrate holding apparatus
EBARA CORP2 citations73
US7547242B2Jun 16, 2009
Substrate polishing apparatus
EBARA CORP7 citations73
US7976358B2Jul 12, 2011
Polishing apparatus and polishing method
EBARA CORP4 citations63
US7361076B2Apr 22, 2008
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus
EBARA CORP4 citations63
US6413155B2Jul 2, 2002
Polishing apparatus
EBARA CORP2 citations63
US7507144B2Mar 24, 2009
Substrate polishing apparatus
EBARA CORP3 citations62
US7427345B2Sep 23, 2008
Method and device for regenerating ion exchanger, and electrolytic processing apparatus
EBARA CORP3 citations62
US6866565B2Mar 15, 2005
Polishing tool and polishing apparatus
EBARA CORP2 citations62
US7578920B2Aug 25, 2009
Electrolytic processing method
EBARA CORP1 citations51
US7476303B2Jan 13, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP0 citations41