Inventor
GRODNENSKY ILYA
US15 patents
⚠️ This page may combine multiple inventors who share the name “GRODNENSKY ILYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON PREC INC
5 patentsUS6750952B2Jun 15, 2004
Apparatus for preforming measurement of a dimension of a test mark for semiconductor processing
NIKON PREC INC63 citations95
US6664121B2Dec 16, 2003
Method and apparatus for position measurement of a pattern formed by a lithographic exposure tool
NIKON PREC INC38 citations88
US6323938B1Nov 27, 2001
Method of characterizing photolithographic tool performance and photolithographic tool thereof
NIKON PREC INC8 citations72
US6538753B2Mar 25, 2003
Method and apparatus for dimension measurement of a pattern formed by lithographic exposure tools
NIKON PREC INC6 citations70
US6956659B2Oct 18, 2005
Measurement of critical dimensions of etched features
NIKON PREC INC4 citations62