Inventor
HATTANGADY SUNIL
US7 patents
⚠️ This page may combine multiple inventors who share the name “HATTANGADY SUNIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
6 patentsUS6136654AOct 24, 2000
Method of forming thin silicon nitride or silicon oxynitride gate dielectrics
TEXAS INSTRUMENTS INC207 citations98
US6610614B2Aug 26, 2003
Method for uniform nitridization of ultra-thin silicon dioxide layers in transistor gates
TEXAS INSTRUMENTS INC67 citations95
US6632747B2Oct 14, 2003
Method of ammonia annealing of ultra-thin silicon dioxide layers for uniform nitrogen profile
TEXAS INSTRUMENTS INC51 citations92
US6780719B2Aug 24, 2004
Method for annealing ultra-thin, high quality gate oxide layers using oxidizer/hydrogen mixtures
TEXAS INSTRUMENTS INC13 citations84
US6423648B2Jul 23, 2002
Controllable oxidation technique for the formation of high-quality ultra-thin gate oxide using carbon dioxide as the oxidizing agent
TEXAS INSTRUMENTS INC3 citations59
US6352941B1Mar 5, 2002
Controllable oxidation technique for high quality ultrathin gate oxide formation
TEXAS INSTRUMENTS INC4 citations59