Inventor
ROTONDARO ANTONIO L P
US49 patents
⚠️ This page may combine multiple inventors who share the name “ROTONDARO ANTONIO L P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
40 patentsUS6835639B2Dec 28, 2004
Multiple work function gates
TEXAS INSTRUMENTS INC130 citations99
US6544906B2Apr 8, 2003
Annealing of high-k dielectric materials
TEXAS INSTRUMENTS INC602 citations99
US5948702ASep 7, 1999
Selective removal of TixNy
TEXAS INSTRUMENTS INC207 citations99
US7105891B2Sep 12, 2006
Gate structure and method
TEXAS INSTRUMENTS INC69 citations98
US7018902B2Mar 28, 2006
Gate dielectric and method
TEXAS INSTRUMENTS INC78 citations98
US6852645B2Feb 8, 2005
High temperature interface layer growth for high-k gate dielectric
TEXAS INSTRUMENTS INC130 citations98
US6821873B2Nov 23, 2004
Anneal sequence for high-κ film property optimization
TEXAS INSTRUMENTS INC106 citations98
US6809370B1Oct 26, 2004
High-k gate dielectric with uniform nitrogen profile and methods for making the same
TEXAS INSTRUMENTS INC81 citations97
US7135361B2Nov 14, 2006
Method for fabricating transistor gate structures and gate dielectrics thereof
TEXAS INSTRUMENTS INC62 citations96
US6770521B2Aug 3, 2004
Method of making multiple work function gates by implanting metals with metallic alloying additives
TEXAS INSTRUMENTS INC63 citations96
US6919251B2Jul 19, 2005
Gate dielectric and method
TEXAS INSTRUMENTS INC32 citations93
US6797599B2Sep 28, 2004
Gate structure and method
TEXAS INSTRUMENTS INC20 citations93
US6642094B2Nov 4, 2003
Complementary transistors having respective gates formed from a metal and a corresponding metal-silicide
TEXAS INSTRUMENTS INC26 citations93
US6638877B2Oct 28, 2003
Ultra-thin SiO2using N2O as the oxidant
TEXAS INSTRUMENTS INC22 citations93
US6261934B1Jul 17, 2001
Dry etch process for small-geometry metal gates over thin gate dielectric
TEXAS INSTRUMENTS INC39 citations93
US6979623B2Dec 27, 2005
Method for fabricating split gate transistor device having high-k dielectrics
TEXAS INSTRUMENTS INC52 citations92
US6342446B1Jan 29, 2002
Plasma process for organic residue removal from copper
TEXAS INSTRUMENTS INC50 citations92
US7045431B2May 16, 2006
Method for integrating high-k dielectrics in transistor devices
TEXAS INSTRUMENTS INC42 citations90
US6214736B1Apr 10, 2001
Silicon processing method
TEXAS INSTRUMENTS INC20 citations89
US8021990B2Sep 20, 2011
Gate structure and method
TEXAS INSTRUMENTS INC11 citations84
US7535066B2May 19, 2009
Gate structure and method
TEXAS INSTRUMENTS INC9 citations84
US7423326B2Sep 9, 2008
Integrated circuits with composite gate dielectric
TEXAS INSTRUMENTS INC11 citations84
US6780719B2Aug 24, 2004
Method for annealing ultra-thin, high quality gate oxide layers using oxidizer/hydrogen mixtures
TEXAS INSTRUMENTS INC13 citations84
US6723658B2Apr 20, 2004
Gate structure and method
TEXAS INSTRUMENTS INC15 citations84
US6727185B1Apr 27, 2004
Dry process for post oxide etch residue removal
TEXAS INSTRUMENTS INC18 citations83
US7291890B2Nov 6, 2007
Gate dielectric and method
TEXAS INSTRUMENTS INC9 citations74
US7169659B2Jan 30, 2007
Method to selectively recess ETCH regions on a wafer surface using capoly as a mask
TEXAS INSTRUMENTS INC7 citations74
US7109077B2Sep 19, 2006
Dual work function gate electrodes using doped polysilicon and a metal silicon germanium compound
TEXAS INSTRUMENTS INC7 citations74
US6794252B2Sep 21, 2004
Method and system for forming dual work function gate electrodes in a semiconductor device
TEXAS INSTRUMENTS INC10 citations74
US6783997B2Aug 31, 2004
Gate structure and method
TEXAS INSTRUMENTS INC12 citations74
US7351626B2Apr 1, 2008
Method for controlling defects in gate dielectrics
TEXAS INSTRUMENTS INC4 citations63
US7233035B2Jun 19, 2007
Dual work function gate electrodes using doped polysilicon and a metal silicon germanium compound
TEXAS INSTRUMENTS INC3 citations63
US7611939B2Nov 3, 2009
Semiconductor device manufactured using a laminated stress layer
TEXAS INSTRUMENTS INC2 citations62
US7449385B2Nov 11, 2008
Gate dielectric and method
TEXAS INSTRUMENTS INC4 citations62
US7033897B2Apr 25, 2006
Encapsulated spacer with low dielectric constant material to reduce the parasitic capacitance between gate and drain in CMOS technology
TEXAS INSTRUMENTS INC5 citations57
US7432566B2Oct 7, 2008
Method and system for forming dual work function gate electrodes in a semiconductor device
TEXAS INSTRUMENTS INC0 citations52
US6939816B2Sep 6, 2005
Method to improve the uniformity and reduce the surface roughness of the silicon dielectric interface
TEXAS INSTRUMENTS INC0 citations52
US6271078B1Aug 7, 2001
Simplifying conductive plate/via isolation
TEXAS INSTRUMENTS INC0 citations52
US7422969B2Sep 9, 2008
Multi-step process for patterning a metal gate electrode
TEXAS INSTRUMENTS INC1 citations51
US6858908B2Feb 22, 2005
Complementary transistors having respective gates formed from a metal and a corresponding metal-silicide
TEXAS INSTRUMENTS INC0 citations42
TOKYO ELECTRON LTD
4 patentsUS10325779B2Jun 18, 2019
Colloidal silica growth inhibitor and associated method and system
TOKYO ELECTRON LTD4 citations72
US10916440B2Feb 9, 2021
Process and apparatus for processing a nitride structure without silica deposition
TOKYO ELECTRON LTD0 citations61
US10515820B2Dec 24, 2019
Process and apparatus for processing a nitride structure without silica deposition
TOKYO ELECTRON LTD1 citations61
US10763120B2Sep 1, 2020
Colloidal silica growth inhibitor and associated method and system
TOKYO ELECTRON LTD0 citations51