Inventor
KAIMOTO YUKO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KAIMOTO YUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
11 patentsUS6344304B1Feb 5, 2002
Radiation sensitive material and method for forming pattern
FUJITSU LTD38 citations96
US6004720ADec 21, 1999
Radiation sensitive material and method for forming pattern
FUJITSU LTD53 citations96
US5585219ADec 17, 1996
Resist composition and process for forming resist pattern
FUJITSU LTD96 citations96
US5660969AAug 26, 1997
Chemical amplification resist and a fabrication process of a semiconductor device that uses such a chemical amplification resist
FUJITSU LTD24 citations92
US5585222ADec 17, 1996
Resist composition and process for forming resist pattern
FUJITSU LTD42 citations92
US5443690AAug 22, 1995
Pattern formation material and pattern formation method
FUJITSU LTD45 citations92
US5506088AApr 9, 1996
Chemically amplified resist composition and process for forming resist pattern using same
FUJITSU LTD23 citations89
US6790589B2Sep 14, 2004
Radiation sensitive material and method for forming pattern
FUJITSU LTD9 citations74
US6120977ASep 19, 2000
Photoresist with bleaching effect
FUJITSU LTD7 citations73
US7465529B2Dec 16, 2008
Radiation sensitive material and method for forming pattern
FUJITSU LTD3 citations63
US7179580B2Feb 20, 2007
Radiation sensitive material and method for forming pattern
FUJITSU LTD3 citations63