P

Inventor

OBI AKIRA

JP9 patents
⚠️ This page may combine multiple inventors who share the name “OBI AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

5 patents
US7245987B2Jul 17, 2007

Cluster tool and transfer control method

TOKYO ELECTRON LTD11 citations82
US7191082B2Mar 13, 2007

Method of inspecting substrate processing apparatus, and storage medium storing inspection program for executing the method

TOKYO ELECTRON LTD7 citations73
US6954716B2Oct 11, 2005

Method of automatically resetting processing apparatus

TOKYO ELECTRON LTD8 citations71
US6970770B2Nov 29, 2005

Cluster tool and method for controlling transport

TOKYO ELECTRON LTD11 citations69
US7555406B2Jun 30, 2009

Method of maintaining and automatically inspecting processing apparatus

TOKYO ELECTRON LTD0 citations50

KAISE SEIICHI

2 patents
US8475623B2Jul 2, 2013

Substrate processing method, system and program

KAISE SEIICHI5 citations69
US8257601B2Sep 4, 2012

Substrate processing method, system and program

KAISE SEIICHI2 citations59

YOSHIDA RYOICHI

1 patent
US8821742B2Sep 2, 2014

Plasma etching method

YOSHIDA RYOICHI8 citations78

TANAKA HISATO

1 patent
US7386423B2Jun 10, 2008

Methods of self-diagnosing software for driving processing apparatus

TANAKA HISATO0 citations43