Inventor
PATEL BAKUL P
US5 patents
Patents
5 patentsUS6235693B1May 22, 2001
Lactam compositions for cleaning organic and plasma etched residues for semiconductor devices
EKC TECHNOLOGY INC111 citations97
US6777380B2Aug 17, 2004
Compositions for cleaning organic and plasma etched residues for semiconductor devices
EKC TECHNOLOGY INC59 citations94
US7456140B2Nov 25, 2008
Compositions for cleaning organic and plasma etched residues for semiconductor devices
EKC TECHNOLOGY INC24 citations91
US7144848B2Dec 5, 2006
Cleaning compositions containing hydroxylamine derivatives and processes using same for residue removal
EKC TECHNOLOGY INC34 citations86
US7273060B2Sep 25, 2007
Methods for chemically treating a substrate using foam technology
EKC TECHNOLOGY INC16 citations81