Inventor
SELIGSON JOEL L
IL11 patents
⚠️ This page may combine multiple inventors who share the name “SELIGSON JOEL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
6 patentsUS7440105B2Oct 21, 2008
Continuously varying offset mark and methods of determining overlay
KLA TENCOR TECH CORP93 citations98
US7608468B1Oct 27, 2009
Apparatus and methods for determining overlay and uses of same
KLA TENCOR TECH CORP75 citations97
US6928628B2Aug 9, 2005
Use of overlay diagnostics for enhanced automatic process control
KLA TENCOR TECH CORP141 citations96
US7876438B2Jan 25, 2011
Apparatus and methods for determining overlay and uses of same
KLA TENCOR TECH CORP31 citations92
US7310789B2Dec 18, 2007
Use of overlay diagnostics for enhanced automatic process control
KLA TENCOR TECH CORP20 citations91
US7111256B2Sep 19, 2006
Use of overlay diagnostics for enhanced automatic process control
KLA TENCOR TECH CORP9 citations72