Inventor
SIMKIN BORIS
IL3 patents
Patents
3 patentsUS6928628B2Aug 9, 2005
Use of overlay diagnostics for enhanced automatic process control
KLA TENCOR TECH CORP141 citations96
US7310789B2Dec 18, 2007
Use of overlay diagnostics for enhanced automatic process control
KLA TENCOR TECH CORP20 citations91
US7111256B2Sep 19, 2006
Use of overlay diagnostics for enhanced automatic process control
KLA TENCOR TECH CORP9 citations72