Inventor
SUMITOMO TAKU
JP11 patents
⚠️ This page may combine multiple inventors who share the name “SUMITOMO TAKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO TAKU
3 patentsUSHIO ELECTRIC INC
3 patentsUS8358069B2Jan 22, 2013
Lighting method of light source apparatus
USHIO ELECTRIC INC8 citations83
US7459708B2Dec 2, 2008
Extreme UV radiation source device and method for eliminating debris which forms within the device
USHIO ELECTRIC INC10 citations83
US7479645B2Jan 20, 2009
Device for producing extreme UV radiation
USHIO ELECTRIC INC8 citations82