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Inventor
MAGTOTO TERESITA QUITUA
US
2 patents
Patents
2 patents
US7291285B2
Nov 6, 2007
Method and system for line-dimension control of an etch process
IBM
4 citations
54
US7700378B2
Apr 20, 2010
Method and system for line-dimension control of an etch process
IBM
0 citations
44