Inventor
MAKINO NATSUKI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “MAKINO NATSUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
12 patentsUS6632335B2Oct 14, 2003
Plating apparatus
EBARA CORP114 citations97
US6689257B2Feb 10, 2004
Substrate processing apparatus and substrate plating apparatus
EBARA CORP54 citations95
US10486285B2Nov 26, 2019
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
US9358662B2Jun 7, 2016
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
US6746589B2Jun 8, 2004
Plating method and plating apparatus
EBARA CORP9 citations74
US11426834B2Aug 30, 2022
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP1 citations73
US7208074B2Apr 24, 2007
Substrate processing apparatus and substrate plating apparatus
EBARA CORP9 citations73
US7387717B2Jun 17, 2008
Method of performing electrolytic treatment on a conductive layer of a substrate
EBARA CORP3 citations62
US7901550B2Mar 8, 2011
Plating apparatus
EBARA CORP5 citations61
US7374646B2May 20, 2008
Electrolytic processing apparatus and substrate processing method
EBARA CORP2 citations61
US9687957B2Jun 27, 2017
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP0 citations52
US7442282B2Oct 28, 2008
Electrolytic processing apparatus and method
EBARA CORP0 citations41