Inventor
KUNISAWA JUNJI
JP50 patents
⚠️ This page may combine multiple inventors who share the name “KUNISAWA JUNJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
45 patentsUS6632335B2Oct 14, 2003
Plating apparatus
EBARA CORP114 citations97
US6558239B2May 6, 2003
Polishing apparatus
EBARA CORP65 citations96
US6689257B2Feb 10, 2004
Substrate processing apparatus and substrate plating apparatus
EBARA CORP54 citations95
US7055535B2Jun 6, 2006
Holding unit, processing apparatus and holding method of substrates
EBARA CORP38 citations92
US6722964B2Apr 20, 2004
Polishing apparatus and method
EBARA CORP17 citations92
US10486285B2Nov 26, 2019
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
US9358662B2Jun 7, 2016
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
US10741423B2Aug 11, 2020
Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate
EBARA CORP9 citations83
US8029653B2Oct 4, 2011
Electroplating apparatus and electroplating method
EBARA CORP13 citations83
US7736474B2Jun 15, 2010
Plating apparatus and plating method
EBARA CORP8 citations82
US6746589B2Jun 8, 2004
Plating method and plating apparatus
EBARA CORP9 citations74
US11426834B2Aug 30, 2022
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP1 citations73
US9269605B2Feb 23, 2016
Substrate gripping apparatus
EBARA CORP4 citations73
US7585205B2Sep 8, 2009
Substrate polishing apparatus and method
EBARA CORP7 citations73
US7208074B2Apr 24, 2007
Substrate processing apparatus and substrate plating apparatus
EBARA CORP9 citations73
US9673067B2Jun 6, 2017
Substrate processing apparatus and processed substrate manufacturing method
EBARA CORP3 citations72
US11380559B2Jul 5, 2022
Carrier device, work processing apparatus, control method of carrier device and storage medium storing program
EBARA CORP2 citations71
US6858084B2Feb 22, 2005
Plating apparatus and method
EBARA CORP6 citations63
US12447449B2Oct 21, 2025
Chemical supply apparatus, cleaning system, and chemical supply method
EBARA CORP0 citations62
US11103972B2Aug 31, 2021
Buff processing device and substrate processing device
EBARA CORP0 citations62
US10926301B2Feb 23, 2021
Liquid supplying device and liquid supplying method
EBARA CORP0 citations62
US10898987B2Jan 26, 2021
Table for holding workpiece and processing apparatus with the table
EBARA CORP0 citations62
US10575697B2Mar 3, 2020
Substrate cleaning apparatus and substrate processing apparatus
EBARA CORP1 citations62
US7387717B2Jun 17, 2008
Method of performing electrolytic treatment on a conductive layer of a substrate
EBARA CORP3 citations62
US11532491B2Dec 20, 2022
Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate
EBARA CORP0 citations61
US10573509B2Feb 25, 2020
Cleaning apparatus and substrate processing apparatus
EBARA CORP1 citations61
US7901550B2Mar 8, 2011
Plating apparatus
EBARA CORP5 citations61
US11664252B2May 30, 2023
Cleaning device, polishing device, and device and method for calculating rotation speed of substrate in cleaning device
EBARA CORP0 citations59
US10361101B2Jul 23, 2019
Substrate cleaning apparatus and substrate processing apparatus X
EBARA CORP1 citations56
US11967508B2Apr 23, 2024
Damper control system and damper control method
EBARA CORP0 citations52
US9892953B2Feb 13, 2018
Substrate gripping apparatus
EBARA CORP0 citations52
US9687957B2Jun 27, 2017
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP0 citations52
US7976362B2Jul 12, 2011
Substrate polishing apparatus and method
EBARA CORP1 citations52
US12208428B2Jan 28, 2025
Liquid supplying device and method for draining liquid thereof
EBARA CORP0 citations51
US12140980B2Nov 12, 2024
Apparatus for supplying liquid, cleaning unit, and apparatus for processing substrate
EBARA CORP0 citations51
US11890652B2Feb 6, 2024
Cleaning chemical liquid supply device and cleaning chemical liquid supply method
EBARA CORP0 citations51
US10500691B2Dec 10, 2019
Substrate processing apparatus and substrate processing method
EBARA CORP0 citations51
US10343192B2Jul 9, 2019
Liquid supplying device and liquid supplying method
EBARA CORP0 citations51
US10018545B2Jul 10, 2018
Substrate cleaning apparatus and method executed in the same
EBARA CORP0 citations51
US11056359B2Jul 6, 2021
Cleaning apparatus and substrate processing apparatus
EBARA CORP0 citations50
US12053851B2Aug 6, 2024
Jig and installation method using same jig
EBARA CORP0 citations47
US10438818B2Oct 8, 2019
Substrate processing apparatus and pipe cleaning method for substrate processing apparatus
EBARA CORP0 citations41
US10340159B2Jul 2, 2019
Cleaning chemical supplying device, cleaning chemical supplying method, and cleaning unit
EBARA CORP0 citations41
US7442282B2Oct 28, 2008
Electrolytic processing apparatus and method
EBARA CORP0 citations41
US10546764B2Jan 28, 2020
Substrate cleaning apparatus and substrate processing apparatus
EBARA CORP0 citations37