Inventor
ROBISON RODNEY LEE
US5 patents
Patents
5 patentsUS6183615B1Feb 6, 2001
Transport system for wafer processing line
TOKYO ELECTRON LTD59 citations91
US8028655B2Oct 4, 2011
Plasma processing system with locally-efficient inductive plasma coupling
TOKYO ELECTRON LTD7 citations82
US7810449B2Oct 12, 2010
Plasma processing system with locally-efficient inductive plasma coupling
TOKYO ELECTRON LTD8 citations82
US7273533B2Sep 25, 2007
Plasma processing system with locally-efficient inductive plasma coupling
TOKYO ELECTRON LTD8 citations72
US7744735B2Jun 29, 2010
Ionized PVD with sequential deposition and etching
TOKYO ELECTRON LTD6 citations60