Inventor

RABELLO SILVIO J

US6 patents

⚠️ This page may combine multiple inventors who share the name “RABELLO SILVIO J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RABELLO SILVIO J

2 patents

US8525993B2Sep 3, 2013

Scatterometry measurement of asymmetric structures

RABELLO SILVIO J16 citations80

US8170838B2May 1, 2012

Simulating two-dimensional periodic patterns using compressed fourier space

RABELLO SILVIO J2 citations59

NANOMETRICS INC

1 patent

US6992764B1Jan 31, 2006

Measuring an alignment target with a single polarization state

NANOMETRICS INC115 citations97

NANOMETRIC INC

1 patent

US7508976B1Mar 24, 2009

Local process variation correction for overlay measurement

NANOMETRIC INC41 citations89

LI JIE

1 patent

US9239523B2Jan 19, 2016

Diffraction based overlay linearity testing

LI JIE2 citations61

JEONG HWAN J

1 patent

US8817273B2Aug 26, 2014

Dark field diffraction based overlay

JEONG HWAN J2 citations53