Inventor
MCGAHAN WILLIAM A
US8 patents
⚠️ This page may combine multiple inventors who share the name “MCGAHAN WILLIAM A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NANOMETRICS INC
6 patentsUS6381009B1Apr 30, 2002
Elemental concentration measuring methods and instruments
NANOMETRICS INC92 citations96
US7115858B1Oct 3, 2006
Apparatus and method for the measurement of diffracting structures
NANOMETRICS INC55 citations95
US6898537B1May 24, 2005
Measurement of diffracting structures using one-half of the non-zero diffracted orders
NANOMETRICS INC59 citations94
US7372565B1May 13, 2008
Spectrometer measurement of diffracting structures
NANOMETRICS INC46 citations92
US6836690B1Dec 28, 2004
High precision substrate prealigner
NANOMETRICS INC20 citations84
US7202958B1Apr 10, 2007
Modeling a sample with an underlying complicated structure
NANOMETRICS INC12 citations82