P

Inventor

TAKATSUKI KOICHI

JP7 patents
⚠️ This page may combine multiple inventors who share the name “TAKATSUKI KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents
US7723241B2May 25, 2010

Plasma processing method and computer storage medium

TOKYO ELECTRON LTD8 citations83
US10309005B2Jun 4, 2019

Deposition device and deposition method

TOKYO ELECTRON LTD3 citations72
US11387112B2Jul 12, 2022

Surface processing method and processing system

TOKYO ELECTRON LTD1 citations62
US7897518B2Mar 1, 2011

Plasma processing method and computer storage medium

TOKYO ELECTRON LTD4 citations61

TAKATSUKI KOICHI

2 patents
US8394231B2Mar 12, 2013

Plasma process device and plasma process method

TAKATSUKI KOICHI3 citations57
US8076252B2Dec 13, 2011

Substrate processing method and substrate processing apparatus

TAKATSUKI KOICHI2 citations56

MATSUYAMA SEIJI

1 patent
US8183165B2May 22, 2012

Plasma processing method

MATSUYAMA SEIJI0 citations48