Inventor
AKAHORI TAKASHI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “AKAHORI TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS6215087B1Apr 10, 2001
Plasma film forming method and plasma film forming apparatus
TOKYO ELECTRON LTD57 citations95
US6949829B2Sep 27, 2005
Semiconductor device and fabrication method therefor
TOKYO ELECTRON LTD22 citations92
US6720659B1Apr 13, 2004
Semiconductor device having an adhesion layer
TOKYO ELECTRON LTD48 citations92
US6355902B2Mar 12, 2002
Plasma film forming method and plasma film forming apparatus
TOKYO ELECTRON LTD23 citations92
US6218299B1Apr 17, 2001
Semiconductor device and method for producing the same
TOKYO ELECTRON LTD47 citations92
US6443165B1Sep 3, 2002
Method for cleaning plasma treatment device and plasma treatment system
TOKYO ELECTRON LTD24 citations91
US6737350B1May 18, 2004
Method of manufacturing semiconductor device
TOKYO ELECTRON LTD22 citations90
US6767829B2Jul 27, 2004
Plasma deposition method and system
TOKYO ELECTRON LTD18 citations84
US6479897B2Nov 12, 2002
Semiconductor device having fluorine-added carbon dielectric film and method of fabricating the same
TOKYO ELECTRON LTD3 citations63
US6337290B1Jan 8, 2002
Semiconductor device having fluorine-added carbon dielectric film and method of fabricating the same
TOKYO ELECTRON LTD2 citations63
US6727182B2Apr 27, 2004
Process for the production of semiconductor device
TOKYO ELECTRON LTD2 citations62
US6320154B1Nov 20, 2001
Plasma processing method
TOKYO ELECTRON LTD3 citations61