P

Inventor

TSUCHIYA TAKAFUMI

JP9 patents
⚠️ This page may combine multiple inventors who share the name “TSUCHIYA TAKAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

6 patents
US12322631B2Jun 3, 2025

Substrate processing system, substrate processing method, and recording medium

TOKYO ELECTRON LTD4 citations72
US11869780B2Jan 9, 2024

Substrate liquid processing apparatus

TOKYO ELECTRON LTD2 citations71
US9305818B2Apr 5, 2016

Substrate processing apparatus

TOKYO ELECTRON LTD1 citations51
US11594430B2Feb 28, 2023

Substrate liquid processing apparatus, substrate liquid processing method and recording medium

TOKYO ELECTRON LTD0 citations45
US10928732B2Feb 23, 2021

Substrate liquid processing apparatus, substrate liquid processing method, and storage medium

TOKYO ELECTRON LTD0 citations44
US10458010B2Oct 29, 2019

Substrate liquid processing apparatus, substrate liquid processing method, and storage medium

TOKYO ELECTRON LTD0 citations34

KAMIKAWA YUJI

1 patent
US8851819B2Oct 7, 2014

Substrate processing apparatus

KAMIKAWA YUJI29 citations91

TANAKA OSAMU

1 patent
US8079797B2Dec 20, 2011

Substrate processing system and substrate transfer method

TANAKA OSAMU19 citations79

TSUCHIYA TAKAFUMI

1 patent
US8790469B2Jul 29, 2014

Treating apparatus, treating method and recording medium

TSUCHIYA TAKAFUMI0 citations28