Inventor

IWABAE TOHRU

JP2 patents

⚠️ This page may combine multiple inventors who share the name “IWABAE TOHRU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TANAKA OSAMU

1 patent

US8079797B2Dec 20, 2011

Substrate processing system and substrate transfer method

TANAKA OSAMU19 citations79

TSUCHIYA TAKAFUMI

1 patent

US8790469B2Jul 29, 2014

Treating apparatus, treating method and recording medium

TSUCHIYA TAKAFUMI0 citations28