Inventor
SAKURAI MASAYA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SAKURAI MASAYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMCO CORP
4 patentsUS11208718B2Dec 28, 2021
Epitaxial growth device, production method for epitaxial wafer, and lift pin for epitaxial growth device
SUMCO CORP2 citations70
US7989073B2Aug 2, 2011
Epitaxial silicon wafer and fabrication method thereof
SUMCO CORP4 citations60
US11264265B2Mar 1, 2022
Lift pin, and epitaxial growth apparatus and method of producing silicon epitaxial wafer using the lift pin
SUMCO CORP0 citations59
US11274371B2Mar 15, 2022
Susceptor and epitaxial growth device
SUMCO CORP0 citations45