Inventor
WOLF ALEXANDER
DE29 patents
⚠️ This page may combine multiple inventors who share the name “WOLF ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
15 patentsUS9759550B2Sep 12, 2017
Projection exposure apparatus for microlithography comprising an optical distance measurement system
ZEISS CARL SMT GMBH2 citations73
US10761429B2Sep 1, 2020
Projection exposure method and projection exposure apparatus for microlithography
ZEISS CARL SMT GMBH2 citations72
US12436361B2Oct 7, 2025
Projection exposure apparatus for semiconductor lithography
ZEISS CARL SMT GMBH0 citations62
US12339587B2Jun 24, 2025
Facet assembly for a facet mirror
ZEISS CARL SMT GMBH0 citations62
US11181826B2Nov 23, 2021
Projection exposure method and projection exposure apparatus for microlithography
ZEISS CARL SMT GMBH0 citations62
US11119413B2Sep 14, 2021
Imaging optical unit for imaging an object field into an image field
ZEISS CARL SMT GMBH1 citations62
US11054755B2Jul 6, 2021
Optical module with an anticollision device for module components
ZEISS CARL SMT GMBH1 citations62
US10261425B2Apr 16, 2019
Projection exposure apparatus with a highly flexible manipulator
ZEISS CARL SMT GMBH1 citations62
US10288894B2May 14, 2019
Optical component for use in a radiation source module of a projection exposure system
ZEISS CARL SMT GMBH0 citations52
US11879721B2Jan 23, 2024
Interferometric measurement method and interferometric measurement arrangement
ZEISS CARL SMT GMBH0 citations51
US9377608B2Jun 28, 2016
Imaging optical unit
ZEISS CARL SMT GMBH1 citations51
US11927500B2Mar 12, 2024
Method and device for characterizing the surface shape of an optical element
ZEISS CARL SMT GMBH0 citations49
US10330903B2Jun 25, 2019
Imaging optical unit for imaging an object field into an image field, and projection exposure apparatus including such an imaging optical unit
ZEISS CARL SMT GMBH0 citations41
US10162267B2Dec 25, 2018
Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations
ZEISS CARL SMT GMBH0 citations41
US9720336B2Aug 1, 2017
Microlithographic apparatus and method of varying a light irradiance distribution
ZEISS CARL SMT GMBH0 citations41