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Inventor
KAISS RAIMUND
DE
1 patents
Patents
1 patent
US8460465B2
Jun 11, 2013
Support ring for supporting a semiconductor wafer composed of monocrystalline silicon during a thermal treatment, method for the thermal treatment of such a semiconductor wafer, and thermally treated semiconductor wafer composed of monocrystalline silicon
DAUB ERICH
0 citations
35