Inventor
KUIJPER ANTHONIE
NL13 patents
⚠️ This page may combine multiple inventors who share the name “KUIJPER ANTHONIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS9454088B2Sep 27, 2016
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV4 citations84
US9772565B2Sep 26, 2017
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV2 citations73
US9164391B2Oct 20, 2015
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV2 citations62
US10712675B2Jul 14, 2020
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV0 citations52
US8054445B2Nov 8, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10018925B2Jul 10, 2018
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9606429B2Mar 28, 2017
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50