Inventor

ENGELHARDT MANFRED

AT70 patents

⚠️ This page may combine multiple inventors who share the name “ENGELHARDT MANFRED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ENGELHARDT MANFRED

INFINEON TECHNOLOGIES AG

Thinning in package using separation structure as stop

Method for fabricating trenches having hallows along the trenches side wall for storage capacitors of DRAM semiconductor memories

Electronic component comprising an electrically conductive connection consisting of carbon nanotubes and a method for producing the same

Structuring method

Structuring process

Method for producing an integrated circuit having at least one metalicized surface

Interconnect arrangement and method for fabricating an interconnect arrangement

Method for fabricating integrated circuit arrangements, and associated circuit arrangements, in particular tunnel contact elements

Structuring method

Method for producing structures having a high aspect ratio and structure having a high aspect ratio

Plasma dicing of silicon carbide

Method for thermal annealing and a semiconductor device formed by the method

Semiconductor devices having insulating substrates and methods of formation thereof

Plasma dicing and semiconductor devices formed thereof

Method of producing an integrated circuit configuration

Integrated circuit configuration using spacers as a diffusion barrier and method of producing such an integrated circuit configuration

Method of patterning ferroelectric layers

Easy to manufacture integrated semiconductor memory configuration with platinum electrodes

Removable indicator structure in electronic chips of a common substrate for process adjustment

Separation of chips on a substrate

Semiconductor devices and methods for manufacturing semiconductor devices

Method of producing an electrode configuration and method of electrically contacting the electrode configuration

Process for producing ultrathin homogenous metal layers

Process for producing and removing a mask layer

Method for fabricating a semiconductor memory component

Plasma systems and methods of processing using thereof

Semiconductor processing system

Process tools and methods of forming devices using process tools

Plasma system, chuck and method of making a semiconductor device

Dielectric structures with negative taper and methods of formation thereof

Semiconductor devices having insulating substrates and methods of formation thereof

Method of protecting sidewall surfaces of a semiconductor device

Process tools and methods of forming devices using process tools

ENGELHARDT MANFRED

MIM capacitor and associated production method

Method for processing a semiconductor wafer or die, and particle deposition device

Interconnect arrangement and associated production methods

Method of separating semiconductor die using material modification

Plasma system, chuck and method of making a semiconductor device

Fabrication of micro lenses

Method for etching substrate

Method of patterning a substrate

SIEMENS AG

Process for generating a space in a structure

Method for structuring a layer using a ring electrode and multiple RF power sources

Method for producing trench structures in silicon substrates for vlsi semiconductor circuits

Integrated circuit arrangement having at least two mutually insulated components, and method for its production

PHILIPS CORP

Cutting unit for a dry-shaving apparatus

Shaving apparatus

BECKER FRANK

Device for detecting movement and forces

BRUNNER HELMUT

Method for separating a plurality of dies and a processing device for separating a plurality of dies

KOEHLER DANIEL

Integrated circuit device having openings in a layered structure