Inventor

CHEN GRACE HSIU-LING

US22 patents

⚠️ This page may combine multiple inventors who share the name “CHEN GRACE HSIU-LING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN GRACE HSIU-LING

KLA TENCOR CORP

Generating simulated output for a specimen

Detecting defects on a wafer using defect-specific and multi-channel information

Hybrid inspectors

Detecting defects on a wafer using defect-specific and multi-channel information

Systems and methods for defect detection using image reconstruction

Method and system for charged particle microscopy with improved image beam stabilization and interrogation

Detecting defects on a wafer using defect-specific and multi-channel information

Generating high resolution images from low resolution images for semiconductor applications

System and method for apodization in a semiconductor device inspection system

Variable polarization wafer inspection

System and method for apodization in a semiconductor device inspection system

Inspection system including parallel imaging paths with multiple and selectable spectral bands

Super resolution inspection system

Method and system for charged particle microscopy with improved image beam stabilization and interrogation

Scratch filter for wafer inspection

Field curvature correction for multi-beam inspection systems

Defect inspection and review using transmissive current image of charged particle beam system

KLA CORP

Multi-element super resolution optical inspection system

System and method for optical wafer characterization with image up-sampling

System and method for reducing sample noise using selective markers

KLA TENCOR TECH CORP

Dark field inspection apparatus and methods

Systems configured to inspect a specimen