Inventor
YOKOGAWA KEN'ETSU
JP15 patents
⚠️ This page may combine multiple inventors who share the name “YOKOGAWA KEN'ETSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
6 patentsUS7771564B2Aug 10, 2010
Plasma processing apparatus
HITACHI HIGH TECH CORP10 citations83
US10665448B2May 26, 2020
Plasma processing apparatus
HITACHI HIGH TECH CORP2 citations73
US10418224B2Sep 17, 2019
Plasma etching method
HITACHI HIGH TECH CORP3 citations71
US9960014B2May 1, 2018
Plasma etching method
HITACHI HIGH TECH CORP4 citations71
US8034181B2Oct 11, 2011
Plasma processing apparatus
HITACHI HIGH TECH CORP2 citations62
US7838792B2Nov 23, 2010
Plasma processing apparatus capable of adjusting temperature of sample stand
HITACHI HIGH TECH CORP4 citations62
HITACHI LTD
5 patentsUS5891252AApr 6, 1999
Plasma processing apparatus
HITACHI LTD60 citations96
US6551445B1Apr 22, 2003
Plasma processing system and method for manufacturing a semiconductor device by using the same
HITACHI LTD50 citations92
US6033481AMar 7, 2000
Plasma processing apparatus
HITACHI LTD41 citations92
US7048869B2May 23, 2006
Plasma processing apparatus and a plasma processing method
HITACHI LTD6 citations63
US5291145AMar 1, 1994
Microwave processing equipment
HITACHI LTD5 citations62