Inventor · disambiguated record

Seigfried Birkle

Also filed as: BIRKLE SEIGFRIED

1 granted patent·11 citations·filing 1993–1993

33Inventor score

Technology areasG03F

Files withSIEMENS AG1

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1 record

0147US5360693APositive o-quinone diazide photoresist containing base copolymer utilizing monomer having anhydride function and further monomer that increases etch resistanceSIEMENS AG·Filed 1993·Granted Nov 1, 1994·11 cites·7 claims

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