Inventor
JEFFER RAYMOND W
US3 patents
Patents
3 patentsUS9996000B2Jun 12, 2018
Test pattern layout for test photomask and method for evaluating critical dimension changes
IBM0 citations47
US9989843B2Jun 5, 2018
Test pattern layout for test photomask and method for evaluating critical dimension changes
IBM0 citations47
US9372394B2Jun 21, 2016
Test pattern layout for test photomask and method for evaluating critical dimension changes
IBM0 citations47