Inventor
MALENFANT JR JOSEPH L
US5 patents
Patents
5 patentsUS6215125B1Apr 10, 2001
Method to operate GEF4 gas in hot cathode discharge ion sources
IBM20 citations86
US9996000B2Jun 12, 2018
Test pattern layout for test photomask and method for evaluating critical dimension changes
IBM0 citations47
US9989843B2Jun 5, 2018
Test pattern layout for test photomask and method for evaluating critical dimension changes
IBM0 citations47
US9372394B2Jun 21, 2016
Test pattern layout for test photomask and method for evaluating critical dimension changes
IBM0 citations47
US6426177B2Jul 30, 2002
Single component developer for use with ghost exposure
IBM0 citations45