Inventor

PARK ALLEN

US36 patents

⚠️ This page may combine multiple inventors who share the name “PARK ALLEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PARK ALLEN

KLA TENCOR CORP

Image based specimen process control

Inspection guided overlay metrology

Using stochastic failure metrics in semiconductor manufacturing

Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a wafer

Measurement of overlay error using device inspection system

Computer-implemented methods for determining if actual defects are potentially systematic defects or potentially random defects

Pattern failure discovery by leveraging nominal characteristics of alternating failure modes

Self directed metrology and pattern classification

Determining one or more characteristics of a pattern of interest on a specimen

Method and system for universal target based inspection and metrology

Finding patterns in a design based on the patterns and their surroundings

Computer assisted weak pattern detection and quantification system

System, method and computer program product for systematic and stochastic characterization of pattern defects identified from a semiconductor wafer

Alteration for wafer inspection

Method and system for weak pattern quantification

Method and system for mixed mode wafer inspection

Metrology optimized inspection

Measurement of overlay error using device inspection system

Based device risk assessment

Hybrid design layout to identify optical proximity correction-related systematic defects

System, method and computer program product for detecting defects in a fabricated target component using consistent modulation for the target and reference components

Method and system for mixed mode wafer inspection

PARK ALLEN

Methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions

Scanner performance comparison and matching using design and defect data

Based device risk assessment

Blasting systems and methods

KLA TENCOR TECH CORP

Methods and systems for utilizing design data in combination with inspection data

Computer-implemented methods, carrier media, and systems for generating a metrology sampling plan

CHANG ELLIS

Inspection guided overlay metrology

Determining design coordinates for wafer defects

KLA-TENCOR TECH CORP

Methods and systems for utilizing design data in combination with inspection data

ZAFAR KHURRAM

Methods and systems for utilizing design data in combination with inspection data

KLA CORP

Computer assisted weak pattern detection and quantification system

PWS SYSTEMS PTY LTD

Blasting method and system

GAO LISHENG

Region based virtual fourier filter

PWS—Stemsafe JV Pty Ltd

Gel stemming delivery system