Inventor
KAMP TOM A
US14 patents
⚠️ This page may combine multiple inventors who share the name “KAMP TOM A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
13 patentsUS6921724B2Jul 26, 2005
Variable temperature processes for tunable electrostatic chuck
LAM RES CORP102 citations97
US6939811B2Sep 6, 2005
Apparatus and method for controlling etch depth
LAM RES CORP17 citations83
US7851369B2Dec 14, 2010
Hardmask trim method
LAM RES CORP9 citations82
US10950454B2Mar 16, 2021
Integrated atomic layer passivation in TCP etch chamber and in-situ etch-ALP method
LAM RES CORP2 citations72
US10163610B2Dec 25, 2018
Extreme edge sheath and wafer profile tuning through edge-localized ion trajectory control and plasma operation
LAM RES CORP3 citations72
US12237203B2Feb 25, 2025
System, method, and user interface for edge ring wear compensation
LAM RES CORP2 citations70
US11031215B2Jun 8, 2021
Vacuum pump protection against deposition byproduct buildup
LAM RES CORP3 citations69
US11710623B2Jul 25, 2023
Vacuum pump protection against deposition byproduct buildup
LAM RES CORP1 citations68
US12494345B2Dec 9, 2025
Pulsing RF coils of a plasma chamber in reverse synchronization
LAM RES CORP1 citations63
US12087561B2Sep 10, 2024
Vacuum pump protection against deposition byproduct buildup
LAM RES CORP0 citations59
US11538713B2Dec 27, 2022
System and method for edge ring wear compensation
LAM RES CORP0 citations58
US9711359B2Jul 18, 2017
Shadow trim line edge roughness reduction
LAM RES CORP1 citations42
US10600648B2Mar 24, 2020
Silicon-based deposition for semiconductor processing
LAM RES CORP0 citations41