Inventor
SAKAI ITSUKO
JP20 patents
⚠️ This page may combine multiple inventors who share the name “SAKAI ITSUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
10 patentsUS5717294AFeb 10, 1998
Plasma process apparatus
TOSHIBA KK65 citations96
US5539211AJul 23, 1996
Charged beam apparatus having cleaning function and method of cleaning charged beam apparatus
TOSHIBA KK56 citations96
US5466942ANov 14, 1995
Charged beam irradiating apparatus having a cleaning means and a method of cleaning a charged beam irradiating apparatus
TOSHIBA KK62 citations96
US5312519AMay 17, 1994
Method of cleaning a charged beam apparatus
TOSHIBA KK104 citations96
US7186315B2Mar 6, 2007
Plasma treatment apparatus
TOSHIBA KK10 citations84
US7022616B2Apr 4, 2006
High speed silicon etching method
TOSHIBA KK15 citations84
US6938638B2Sep 6, 2005
Gas circulating-processing apparatus
TOSHIBA KK13 citations84
US6780278B2Aug 24, 2004
Plasma processing apparatus with reduced parasitic capacity and loss in RF power
TOSHIBA KK16 citations84
US6689699B2Feb 10, 2004
Method for manufacturing a semiconductor device using recirculation of a process gas
TOSHIBA KK8 citations74
US7182879B2Feb 27, 2007
Plasma processing method
TOSHIBA KK0 citations42
TOKYO ELECTRON LTD
4 patentsUS6642149B2Nov 4, 2003
Plasma processing method
TOKYO ELECTRON LTD92 citations97
US7628931B2Dec 8, 2009
Processing method for conservation of processing gases
TOKYO ELECTRON LTD7 citations73
US7368876B2May 6, 2008
Plasma processing apparatus
TOKYO ELECTRON LTD3 citations61
US7767055B2Aug 3, 2010
Capacitive coupling plasma processing apparatus
TOKYO ELECTRON LTD5 citations59