Inventor
MIZUNO FUMIO
JP49 patents
⚠️ This page may combine multiple inventors who share the name “MIZUNO FUMIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
31 patentsUS6538249B1Mar 25, 2003
Image-formation apparatus using charged particle beams under various focus conditions
HITACHI LTD118 citations99
US5412210AMay 2, 1995
Scanning electron microscope and method for production of semiconductor device by using the same
HITACHI LTD148 citations99
US6047083AApr 4, 2000
Method of and apparatus for pattern inspection
HITACHI LTD113 citations98
US6542830B1Apr 1, 2003
Process control system
HITACHI LTD93 citations96
US6114695ASep 5, 2000
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD62 citations96
US6072178AJun 6, 2000
Sample analyzing apparatus
HITACHI LTD79 citations96
US6067153AMay 23, 2000
Pattern defect inspecting apparatus
HITACHI LTD57 citations96
US5969357AOct 19, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD43 citations96
US5866904AFeb 2, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD42 citations96
US5777327AJul 7, 1998
Pattern shape inspection apparatus for forming specimen image on display apparatus
HITACHI LTD64 citations96
US5750990AMay 12, 1998
Method for measuring critical dimension of pattern on sample
HITACHI LTD87 citations96
US5594245AJan 14, 1997
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD71 citations96
US5436095AJul 25, 1995
Manufacturing method or an exposing method for a semiconductor device for a semiconductor integrated circuit device and a mask used therefor
HITACHI LTD65 citations96
US7642514B2Jan 5, 2010
Charged particle beam apparatus
HITACHI LTD14 citations93
US7109485B2Sep 19, 2006
Charged particle beam apparatus
HITACHI LTD19 citations93
US6936818B2Aug 30, 2005
Charged particle beam apparatus
HITACHI LTD12 citations93
US6653633B2Nov 25, 2003
Charged particle beam apparatus
HITACHI LTD22 citations93
US6157451ADec 5, 2000
Sample CD measurement system
HITACHI LTD24 citations93
US5736300AApr 7, 1998
Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor
HITACHI LTD25 citations92
US5405810AApr 11, 1995
Alignment method and apparatus
HITACHI LTD36 citations92
US6757621B2Jun 29, 2004
Process management system
HITACHI LTD35 citations91
US6573499B1Jun 3, 2003
Microstructured pattern inspection method
HITACHI LTD12 citations82
US5578422ANov 26, 1996
Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor
HITACHI LTD15 citations82
US7791021B2Sep 7, 2010
Microstructured pattern inspection method
HITACHI LTD6 citations74
US7435959B2Oct 14, 2008
Microstructured pattern inspection method
HITACHI LTD7 citations74
US7329868B2Feb 12, 2008
Charged particle beam apparatus
HITACHI LTD7 citations74
US7217923B2May 15, 2007
Microstructured pattern inspection method
HITACHI LTD7 citations74
US6936819B2Aug 30, 2005
Microstructured pattern inspection method
HITACHI LTD4 citations74
US6765204B2Jul 20, 2004
Microstructured pattern inspection method
HITACHI LTD7 citations74
US4118794AOct 3, 1978
Memory array with larger memory capacitors at row ends
HITACHI LTD9 citations74
USRE37996EFeb 18, 2003
Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor
HITACHI LTD4 citations62
NGK SPARK PLUG CO
11 patentsUS4735926AApr 5, 1988
Alumina ceramic body
NGK SPARK PLUG CO22 citations82
US4585745AApr 29, 1986
Dielectric ceramic composition for high frequency purposes
NGK SPARK PLUG CO23 citations76
US5155092AOct 13, 1992
Ceramic superconducting composition and process and apparatus for preparing thereof
NGK SPARK PLUG CO8 citations74
US4866016ASep 12, 1989
Alumina-based ceramic composition
NGK SPARK PLUG CO18 citations74
US4720471AJan 19, 1988
Alumina porcelain compositions
NGK SPARK PLUG CO13 citations74
US4668646AMay 26, 1987
Alumina ceramic composition
NGK SPARK PLUG CO16 citations74
US4614725ASep 30, 1986
Alumina porcelain composition
NGK SPARK PLUG CO13 citations74
US4591574AMay 27, 1986
Alumina porcelain composition
NGK SPARK PLUG CO11 citations74
US5272122ADec 21, 1993
BaO-xTiO2 dielectric ceramic composition
NGK SPARK PLUG CO5 citations63
US5198396AMar 30, 1993
Microwave dielectric ceramic composition
NGK SPARK PLUG CO2 citations63
US4643985AFeb 17, 1987
Dielectric porcelain material
NGK SPARK PLUG CO6 citations63
NITTO DENKO CORP
2 patentsUS5466325ANov 14, 1995
Resist removing method, and curable pressure-sensitive adhesive, adhesive sheets and apparatus used for the method
NITTO DENKO CORP83 citations95
US5959011ASep 28, 1999
Resist removing method, and curable pressure-sensitive adhesive, adhesive sheets and apparatus used for the method
NITTO DENKO CORP17 citations90