Inventor

KOAI KEITH

US5 patents

⚠️ This page may combine multiple inventors who share the name “KOAI KEITH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents

US6050506AApr 18, 2000

Pattern of apertures in a showerhead for chemical vapor deposition

APPLIED MATERIALS INC708 citations98

US6106625AAug 22, 2000

Reactor useful for chemical vapor deposition of titanium nitride

APPLIED MATERIALS INC627 citations96

US6410089B1Jun 25, 2002

Chemical vapor deposition of copper using profiled distribution of showerhead apertures

APPLIED MATERIALS INC23 citations92

US6063441AMay 16, 2000

Processing chamber and method for confining plasma

APPLIED MATERIALS INC42 citations92

TAIWAN SEMICONDUCTOR MFG

1 patent

US9281221B2Mar 8, 2016

Ultra-high vacuum (UHV) wafer processing

TAIWAN SEMICONDUCTOR MFG1 citations47