P

Inventor

ZHENG BO

US153 patents
⚠️ This page may combine multiple inventors who share the name “ZHENG BO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

14 patents
US6171661B1Jan 9, 2001

Deposition of copper with increased adhesion

APPLIED MATERIALS INC362 citations99
US6110530AAug 29, 2000

CVD method of depositing copper films by using improved organocopper precursor blend

APPLIED MATERIALS INC272 citations99
US6461435B1Oct 8, 2002

Showerhead with reduced contact area

APPLIED MATERIALS INC600 citations98
US6050506AApr 18, 2000

Pattern of apertures in a showerhead for chemical vapor deposition

APPLIED MATERIALS INC708 citations98
US9685371B2Jun 20, 2017

Method of enabling seamless cobalt gap-fill

APPLIED MATERIALS INC35 citations94
US9528183B2Dec 27, 2016

Cobalt removal for chamber clean or pre-clean process

APPLIED MATERIALS INC25 citations93
US7285195B2Oct 23, 2007

Electric field reducing thrust plate

APPLIED MATERIALS INC25 citations92
US6913680B1Jul 5, 2005

Method of application of electrical biasing to enhance metal deposition

APPLIED MATERIALS INC30 citations92
US6610189B2Aug 26, 2003

Method and associated apparatus to mechanically enhance the deposition of a metal film within a feature

APPLIED MATERIALS INC35 citations92
US6410089B1Jun 25, 2002

Chemical vapor deposition of copper using profiled distribution of showerhead apertures

APPLIED MATERIALS INC23 citations92
US6319728B1Nov 20, 2001

Method for treating a deposited film for resistivity reduction

APPLIED MATERIALS INC43 citations91
US6179925B1Jan 30, 2001

Method and apparatus for improved control of process and purge material in substrate processing system

APPLIED MATERIALS INC21 citations89
US8951913B2Feb 10, 2015

Method for removing native oxide and associated residue from a substrate

APPLIED MATERIALS INC5 citations84
US6911136B2Jun 28, 2005

Method for regulating the electrical power applied to a substrate during an immersion process

APPLIED MATERIALS INC12 citations82

UNIV CHICAGO

7 patents

INTEL CORP

6 patents

ISMAGILOV RUSTEM F

4 patents

ADVANCED RISC MACH LTD

3 patents

INST GEOLOGY & GEOPHYSICS CAS

3 patents

TECHCARE TECHNOLOGY LTD

2 patents

ZHENG BO

2 patents

ISMAGLIOV RUSTEM F

1 patent

LAM HYMAN

1 patent

ZOPE BHUSHAN N

1 patent

YONGKANG CHUNKAI IMP & EXPORT CO LTD

1 patent

UNIV NEW YORK STATE RES FOUND

1 patent

HOPESTAR ELECTRONICS LTD

1 patent

LAM HYMAN W H

1 patent

TENCENT TECH SHENZHEN CO LTD

1 patent

CANON KK

1 patent

Showing the top 50 of 153 patents by PatentIndex Score.