Inventor
SHIBAZAKI TOMOTAKA
JP7 patents
Patents
7 patentsUS11049687B2Jun 29, 2021
Stage apparatus and charged particle beam apparatus
HITACHI HIGH TECH CORP1 citations61
US11418101B2Aug 16, 2022
Linear motor for vacuum and vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations59
US11380515B2Jul 5, 2022
Charged particle beam device
HITACHI HIGH TECH CORP0 citations56
US12578660B2Mar 17, 2026
Image capturing apparatus and image capturing method
HITACHI HIGH TECH CORP0 citations51
US10879033B2Dec 29, 2020
Stage apparatus, and charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations51
US10658151B2May 19, 2020
Stage device and charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US10600614B2Mar 24, 2020
Stage device and charged particle beam device
HITACHI HIGH TECH CORP0 citations51