Inventor
DUNN TODD
US19 patents
⚠️ This page may combine multiple inventors who share the name “DUNN TODD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
11 patentsUS9299595B2Mar 29, 2016
Susceptor heater and method of heating a substrate
ASM IP HOLDING BV506 citations98
US9005539B2Apr 14, 2015
Chamber sealing member
ASM IP HOLDING BV547 citations98
US9340874B2May 17, 2016
Chamber sealing member
ASM IP HOLDING BV19 citations92
US10714315B2Jul 14, 2020
Semiconductor reaction chamber showerhead
ASM IP HOLDING BV12 citations86
US11501956B2Nov 15, 2022
Semiconductor reaction chamber showerhead
ASM IP HOLDING BV5 citations73
US11629406B2Apr 18, 2023
Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate
ASM IP HOLDING BV3 citations72
US10832903B2Nov 10, 2020
Process feed management for semiconductor substrate processing
ASM IP HOLDING BV4 citations72
US12234552B2Feb 25, 2025
Semiconductor processing apparatus and methods for monitoring and controlling a semiconductor processing apparatus
ASM IP HOLDING BV0 citations62
US12472539B2Nov 18, 2025
Methods and apparatus for cleaning a vessel
ASM IP HOLDING BV0 citations58
USD1059311SJan 28, 2025
Reaction chamber base plate
ASM IP HOLDING BV0 citations51
USD1099184SOct 21, 2025
Weighted lift pin
ASM IP HOLDING BV0 citations50
DUNN TODD
4 patentsUS9574268B1Feb 21, 2017
Pulsed valve manifold for atomic layer deposition
DUNN TODD510 citations98
US9202727B2Dec 1, 2015
Susceptor heater shim
DUNN TODD524 citations98
US8933375B2Jan 13, 2015
Susceptor heater and method of heating a substrate
DUNN TODD517 citations98
US8251818B1Aug 28, 2012
Reflex training and improvement system
DUNN TODD6 citations64