Inventor

MARQUARDT DAVE

US5 patents

⚠️ This page may combine multiple inventors who share the name “MARQUARDT DAVE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

2 patents

US6918824B2Jul 19, 2005

Uniform fluid distribution and exhaust system for a chemical-mechanical planarization device

NOVELLUS SYSTEMS INC22 citations92

US7040957B2May 9, 2006

Platen and manifold for polishing workpieces

NOVELLUS SYSTEMS INC3 citations62

ASM INC

1 patent

US9892908B2Feb 13, 2018

Process feed management for semiconductor substrate processing

ASM INC479 citations98

PETTINGER FRED

1 patent

US9017481B1Apr 28, 2015

Process feed management for semiconductor substrate processing

PETTINGER FRED761 citations96

ASM IP HOLDING BV

1 patent

US10832903B2Nov 10, 2020

Process feed management for semiconductor substrate processing

ASM IP HOLDING BV4 citations72