Inventor
IBRANI SOKOL
US7 patents
⚠️ This page may combine multiple inventors who share the name “IBRANI SOKOL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FSI INT INC
3 patentsUS6307184B1Oct 23, 2001
Thermal processing chamber for heating and cooling wafer-like objects
FSI INT INC71 citations94
US6423947B2Jul 23, 2002
Thermal processing chamber for heating and cooling wafer-like objects
FSI INT INC27 citations90
US6838115B2Jan 4, 2005
Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devices
FSI INT INC10 citations71